Kim, Eun Sok <br/><br/>
Fundamentals of microelectromechanical systems (MEMS) / 
Eun Sok Kim (Author) 
 - New York:  McGraw Hill;  2021. 
 - 396 p. 
<br/><br/><label>ISBN: </label>9781264257584 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Micro-electrical-mechanical systems<br/>Electrical engineering
<br/><br/><label>Dewey Class. No.: </label>621.381  / Ki Fu