Gardner, J. W.  1958- <br/><br/>
Microsensors, MEMS, and smart devices / 
Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim. 
 - Chichester ;  New York :  J. Wiley,  c2001. 
 - xvi, 503 p. :  ill. ;  25 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9780471861096 (alk. paper) 
<br/><br/><label>LCCN: </label>2001024353 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Detectors.<br/>Intelligent control systems.
<br/><br/><label>LC Class. No.: </label>TK7875  / .G37 2001 
<br/><br/><label>Dewey Class. No.: </label>621.381