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1.
Practical MEMS / Ville Kaajakari.

by Kaajakari, Ville.

Material type: Text Text; Format: print ; Literary form: Not fiction Publisher: [Las Vegas, Nev.] : Small Gear Pub., c2009Availability: Items available for loan: [Call number: 621.381 Ka Pr] (1).

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2.
MEMS and microsystems : design, manufacture, and nanoscale engineering / Tai-Ran Hsu.

by Hsu, Tai-Ran.

Edition: 2nd ed.Material type: Text Text; Format: print ; Literary form: Not fiction Publisher: Hoboken, N.J. : John Wiley, 2008Online access: Table of contents only | Publisher description | Contributor biographical information Availability: Items available for loan: [Call number: 621.381 Hs Mi] (1).

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3.
Microsensors, MEMS, and smart devices / Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim.

by Gardner, J. W. (Julian W.), 1958- | Varadan, V. K, 1943- | Awadelkarim, Osama O.

Material type: Text Text; Format: print ; Literary form: Not fiction Publisher: Chichester ; New York : J. Wiley, c2001Online access: Publisher description | Table of Contents Availability: Items available for loan: [Call number: 621.381 Ga Mi] (1).

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