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	1.	Practical MEMS / Ville Kaajakari. by Kaajakari, Ville Material type: Text; Format: print ; Literary form: Not fiction Publication details: [Las Vegas, Nev.] : Small Gear Pub., c2009 Availability: Items available for loan: KCST Library (1)Call number: 621.381 Ka Pr. Place hold Save to lists
	2.	MEMS and microsystems : design, manufacture, and nanoscale engineering / Tai-Ran Hsu. by Hsu, Tai-Ran Edition: 2nd ed. Material type: Text; Format: print ; Literary form: Not fiction Publication details: Hoboken, N.J. : John Wiley, 2008 Online resources: Table of contents only Publisher description Contributor biographical information Availability: Items available for loan: KCST Library (1)Call number: 621.381 Hs Mi. Place hold Save to lists
	3.	Microsensors, MEMS, and smart devices / Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim. by Gardner, J. W. (Julian W.), 1958- Varadan, V. K, 1943- Awadelkarim, Osama O Material type: Text; Format: print ; Literary form: Not fiction Publication details: Chichester ; New York : J. Wiley, c2001 Online resources: Publisher description Table of Contents Availability: Items available for loan: KCST Library (1)Call number: 621.381 Ga Mi. Place hold Save to lists

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