| 000 | 00809cam a22002657a 4500 | ||
|---|---|---|---|
| 999 |
_c351 _d351 |
||
| 001 | 15843393 | ||
| 003 | OSt | ||
| 005 | 20200202111813.0 | ||
| 008 | 090730s2009 nvua b 001 0 eng | ||
| 010 | _a 2009900294 | ||
| 020 | _a9780982299104 (hbk. : alk. paper) | ||
| 040 |
_aDLC _cKCST _dKCST |
||
| 050 | 0 | 0 |
_aTK7875 _b.K33 2009 |
| 082 |
_a621.381 _bKa Pr |
||
| 100 | 1 |
_aKaajakari, Ville. _91191 |
|
| 245 | 1 | 0 |
_aPractical MEMS / _cVille Kaajakari. |
| 260 |
_a[Las Vegas, Nev.] : _bSmall Gear Pub., _cc2009. |
||
| 300 |
_axvi, 478 p. : _bill. ; _c27 cm. |
||
| 504 | _aIncludes bibliographical references (p. [447]-467) and index. | ||
| 650 | 0 |
_aMicroelectromechanical systems. _91192 |
|
| 650 | 0 |
_aTransducers. _91193 |
|
| 650 | 0 |
_aAccelerometers. _91194 |
|
| 650 | 0 |
_aGyroscopes. _91195 |
|
| 942 |
_2ddc _cBO |
||