000 01094cam a22002894a 4500
001 12346937
005 20250224105831.0
008 010314s2001 enka b 001 0 eng
010 _a 2001024353
020 _a9780471861096 (alk. paper)
040 _aDLC
_cKCST
042 _apcc
050 0 0 _aTK7875
_b.G37 2001
082 0 0 _a621.381
_221
100 1 _aGardner, J. W.
_q(Julian W.),
_d1958-
_94539
245 1 0 _aMicrosensors, MEMS, and smart devices /
_cJulian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim.
260 _aChichester ;
_aNew York :
_bJ. Wiley,
_cc2001.
300 _axvi, 503 p. :
_bill. ;
_c25 cm.
504 _aIncludes bibliographical references and index.
650 0 _aMicroelectromechanical systems.
_91192
650 0 _aDetectors.
_94540
650 0 _aIntelligent control systems.
_94541
700 1 _aVaradan, V. K.,
_d1943-
_94542
700 1 _aAwadelkarim, Osama O.
_94543
856 4 2 _3Publisher description
_uhttp://www.loc.gov/catdir/description/wiley034/2001024353.html
856 4 _3Table of Contents
_uhttp://www.loc.gov/catdir/toc/onix06/2001024353.html
999 _c447
_d447