| 000 | 00544nam a22001817a 4500 | ||
|---|---|---|---|
| 999 |
_c7920 _d7920 |
||
| 005 | 20231023091957.0 | ||
| 008 | 231023b ||||| |||| 00| 0 eng d | ||
| 020 | _a9781264257584 | ||
| 040 | _cKCST | ||
| 082 |
_a621.381 _bKi Fu |
||
| 100 |
_aKim, Eun Sok _97698 |
||
| 245 |
_aFundamentals of microelectromechanical systems (MEMS) / _cEun Sok Kim (Author) |
||
| 260 |
_aNew York: _bMcGraw Hill; _c2021. |
||
| 300 | _a396 p. | ||
| 650 |
_aMicro-electrical-mechanical systems _97699 |
||
| 650 |
_aElectrical engineering _9595 |
||
| 942 |
_2ddc _cCTBK |
||